From hector at snf.stanford.edu Tue Sep 6 11:41:03 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Tue, 6 Sep 2011 11:41:03 -0700 Subject: Problem svgdev2 SNF 2011-09-06 11:41:03: bowl guard problems Message-ID: doesn't move and system freezes unless you manually lift the guard From gsosa at snf.stanford.edu Tue Sep 6 13:03:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 6 Sep 2011 13:03:09 -0700 Subject: Problem svgdev2 SNF 2011-09-06 11:41:03: bowl guard problems Message-ID: Cycled wafers through track with standard program. Could not reproduce the problem. From dton at snf.stanford.edu Tue Sep 6 18:23:40 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 6 Sep 2011 18:23:40 -0700 Subject: Problem svgdev2 SNF 2011-09-06 18:23:39: Machine stopped after finished 1 wafer during auto Message-ID: Either it won't start the wafer or stop after finished 1 wafer. From gsosa at snf.stanford.edu Wed Sep 7 07:13:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Sep 2011 07:13:32 -0700 Subject: Shutdown svgdev2 SNF 2011-09-07 07:13:31: Scheduled Shutdown Message-ID: System Shutdown. Solvent exhaust upgrade in progress. From mahnaz at snf.stanford.edu Thu Sep 8 16:27:05 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 8 Sep 2011 16:27:05 -0700 Subject: Shutdown svgdev2 SNF 2011-09-07 07:13:31: Scheduled Shutdown Message-ID: dose to clear wafer Gary shut on asm looks perfect at 55. From mahnaz at snf.stanford.edu Thu Sep 8 16:27:44 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 8 Sep 2011 16:27:44 -0700 Subject: Problem svgdev2 SNF 2011-09-06 18:23:39: Machine stopped after finished 1 wafer during auto Message-ID: system has been tested by Mario From quickwin at snf.stanford.edu Thu Sep 8 18:58:37 2011 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 8 Sep 2011 18:58:37 -0700 Subject: Problem svgdev2 SNF 2011-09-08 18:58:37: wafer does not spin after gtting into vacuum chuck Message-ID: From vilanova at snf.stanford.edu Fri Sep 9 08:31:13 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Sep 2011 08:31:13 -0700 Subject: Problem svgdev2 SNF 2011-09-08 18:58:37: wafer does not spin after gtting into vacuum chuck Message-ID: System tested, Working Fine, couldnt repeat the user Problem, Cycled 7 wafers without a problem , ok to use.