Shutdown svgdev2 SNF 2011-09-07 07:13:31: Scheduled Shutdown

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Sep 7 07:13:32 PDT 2011

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System Shutdown. Solvent exhaust upgrade in progress.

Previous message: Problem svgdev2 SNF 2011-09-06 18:23:39: Machine stopped after finished 1 wafer during auto
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