Problem svgdev2 SNF 2011-09-08 18:58:37: wafer does not spin after gtting into vacuum chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 9 08:31:13 PDT 2011


System tested, Working Fine, couldnt repeat the user Problem,
Cycled  7 wafers without a problem , ok  to use. 




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