From hector at snf.stanford.edu Fri Apr 20 22:37:37 2012 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Fri, 20 Apr 2012 22:37:37 -0700 Subject: Problem svgdev2 SNF 2012-04-20 22:37:36: broken wafer Message-ID: one wafer broke during develop I rinsed the pieces down into bowl with H2O, then dried unit. I ran two test wafer thru and seems ok... From vilanova at snf.stanford.edu Mon Apr 23 08:37:32 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Apr 2012 08:37:32 -0700 Subject: Problem svgdev2 SNF 2012-04-20 22:37:36: broken wafer Message-ID: Removed Small Pieces from catch cup , cleaned Station and Cycled All Dummy wafers, Ok to use. From trejo10 at snf.stanford.edu Thu Apr 26 20:09:27 2012 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Thu, 26 Apr 2012 20:09:27 -0700 Subject: Comment svgdev2 SNF 2012-04-26 20:09:26: Photoresist on Hot Plate Message-ID: I accidentally put my quartz wafer upside down. Most of the resist has been removed but there is still traces of it left. I aplogize for my mistake. Instrument is still in working condition to the best of my assessment.