From gsosa at snf.stanford.edu Tue Feb 14 15:39:25 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:39:25 -0800 Subject: Shutdown svgdev2 SNF 2011-12-14 09:43:27: shutdown Message-ID: Powered up and stabilized system after renovation shutdown. Wiped down all surfaces. Checked process programs- OK. Verified hotplate temperature- OK. Flushed chemical lines and purged in fresh developer. OPerational checkout OK. From mahnaz at snf.stanford.edu Tue Feb 14 16:20:37 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 14 Feb 2012 16:20:37 -0800 Subject: Problem svgdev2 SNF 2012-02-14 16:20:37: wafer sits off center on hot plate Message-ID: From vilanova at snf.stanford.edu Wed Feb 15 08:16:46 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:16:46 -0800 Subject: Problem svgdev2 SNF 2012-02-14 16:20:37: wafer sits off center on hot plate Message-ID: Adjusted Wafer In Speed , Tested Ok, Ready to Use. From iwami at snf.stanford.edu Tue Feb 21 17:10:16 2012 From: iwami at snf.stanford.edu (iwami at snf.stanford.edu) Date: Tue, 21 Feb 2012 17:10:16 -0800 Subject: Problem svgdev2 SNF 2012-02-21 17:10:16: wafer transfer does not start Message-ID: Wafer transfer does not start. When I push start button, the both station goes down but rubber-ring wafer transfer mechanism does not work. Although I tried to "Manual"->"Clear"->"Index Reset", it does not recovered so I used svgdev 1. From iwami at snf.stanford.edu Tue Feb 21 17:38:53 2012 From: iwami at snf.stanford.edu (iwami at snf.stanford.edu) Date: Tue, 21 Feb 2012 17:38:53 -0800 Subject: Comment svgdev2 SNF 2012-02-21 17:38:52: Developer is filled Message-ID: I checked the tank but and develper is fullfilled properly. From vilanova at snf.stanford.edu Wed Feb 22 14:31:55 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Feb 2012 14:31:55 -0800 Subject: Problem svgdev2 SNF 2012-02-21 17:10:16: wafer transfer does not start Message-ID: Tested the system , Cycled Wafers, Track Working Fine, Please remember that On the developer Track # 1 is The back one and track # 2 Is the front track. From vilanova at snf.stanford.edu Wed Feb 22 14:32:02 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Feb 2012 14:32:02 -0800 Subject: Comment svgdev2 SNF 2012-02-21 17:38:52: Developer is filled Message-ID: Tested the system , Cycled Wafers, Track Working Fine, Please remember that On the developer Track # 1 is The back one and track # 2 Is the front track. From vilanova at snf.stanford.edu Mon Feb 27 15:00:14 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Feb 2012 15:00:14 -0800 Subject: Shutdown svgdev2 SNF 2012-02-27 15:00:13: Found a Damage motor during daily routine. Message-ID: Found a Damage motor during daily routine.Under maintenance.. and repair ......... From gsosa at snf.stanford.edu Tue Feb 28 14:22:56 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Feb 2012 14:22:56 -0800 Subject: Shutdown svgdev2 SNF 2012-02-27 15:00:13: Found a Damage motor during daily routine. Message-ID: Replaced the spin motor. Still have an issue with spindle calibration. Verified that encoder sensor working properly. etermined that IO board was bad. Replaced the IO board. Calibrated spindle to 9.5 krpm'd. Tested track operation. All functioning OK.