Problem svgdev2 SNF 2012-02-21 17:10:16: wafer transfer does not start

iwami at snf.stanford.edu iwami at snf.stanford.edu
Tue Feb 21 17:10:16 PST 2012


Wafer transfer does not start. When I push start button, the both station goes down but rubber-ring wafer transfer mechanism does not work.
Although I tried to "Manual"->"Clear"->"Index Reset", it does not recovered so I used svgdev 1.




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