Problem svgdev2 SNF 2012-07-31 17:19:38: shattered wafer

amoini at snf.stanford.edu amoini at snf.stanford.edu
Tue Jul 31 17:19:39 PDT 2012


front track shattered a wafer almost immediately after the wafer was loaded onto the dev chuck. i'm not sure what caused it to shatter. was not due to user error in loading, etc. small pieces may be found on both dev tracks.




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