From sclaussen at snf.stanford.edu  Wed Jun 20 11:23:34 2012
From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu)
Date: Wed, 20 Jun 2012 11:23:34 -0700
Subject: Problem svgdev2 SNF 2012-06-20 11:23:33: Send cassette stuck down
Message-ID: <mailman.947.1357938785.25913.svgdev2-pcs@snf.stanford.edu>

Took wafer, then didn't move down for next wafer. Track kept moving. I tried resetting the various parts, and it wouldn't work and started to alarm. I unloaded my wafers and disabled, but it probably needs to be reset.



From vilanova at snf.stanford.edu  Wed Jun 20 13:22:38 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 20 Jun 2012 13:22:38 -0700
Subject: Problem svgdev2 SNF 2012-06-20 11:23:33: Send cassette stuck down
Message-ID: <mailman.948.1357938785.25913.svgdev2-pcs@snf.stanford.edu>

System was waiting For a wafer to go through  But theres was no wafer, I put a wafer On the belt and  it went through without any Alarms, Cycled 5 Dummy wafers Using the Regular Recipe # 3 bake program 1 
System Working Normal, Back to life Ok to use.