From jsegal at snf.stanford.edu  Fri Mar  2 09:10:15 2012
From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu)
Date: Fri, 2 Mar 2012 09:10:15 -0800
Subject: Problem svgdev2 SNF 2012-03-02 09:10:15: developer drips
Message-ID: <mailman.935.1357938785.25913.svgdev2-pcs@snf.stanford.edu>

During the bake-only run, a drop of developer fell on 3/17 wafers while they were waiting on the spin chuck to move to the hotplate



From vilanova at snf.stanford.edu  Fri Mar  2 11:23:02 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 2 Mar 2012 11:23:02 -0800
Subject: Problem svgdev2 SNF 2012-03-02 09:10:15: developer drips
Message-ID: <mailman.936.1357938785.25913.svgdev2-pcs@snf.stanford.edu>

Cleaned water dispense hose and tested ok ,
System Operations ok, Ready to use.