Problem svgdev2 SNF 2012-03-02 09:10:15: developer drips
jsegal at snf.stanford.edu
jsegal at snf.stanford.edu
Fri Mar 2 09:10:15 PST 2012
During the bake-only run, a drop of developer fell on 3/17 wafers while they were waiting on the spin chuck to move to the hotplate
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