From amol at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem svgdev2: Message-ID: Wafers are not being transferred from cassette to developer station. Cassette load is transferred to the lowermost wafer and there is a chance of breaking wafers. From amol at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem svgdev2: Message-ID: Receiver cassette motion is not smooth. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear svgdev2: Message-ID: no problem found. please give a brief description of the problem you encounter when changing the status of this tool. I cycled several wafers in prog #3, no bake. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear svgdev2: Message-ID: npf From phimmer at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem svgdev2: wafer sat at spin-did not go down Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem Clear svgdev2: Message-ID: cycled wafers, npf. phimmer, i think your wafers are not being seen by the track sensors. might be a reflectivity problem. From mtang at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Apr 18, 2000 Subject: Problem svgdev2: Message-ID: On Program 6, it frequently stops (and gets stuck) after developing (the wafer chuck vacuum still holds the wafer and the track is still spread apart.) Power cycling reset it, but it still happens about 80% of the time. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 19, 2000 Subject: Problem Clear svgdev2: Message-ID: cleaned and lubed rails, cycled wafers. tested ok. From sminne at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Apr 19, 2000 Subject: Problem svgdev2: input loader doesn't start Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 20, 2000 Subject: Problem Clear svgdev2: Message-ID: cycled wafers, npf. From aaronp at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Apr 29, 2000 Subject: Problem svgdev2: no 26W resist Message-ID: From prisbe at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 1, 2000 Subject: Problem Clear svgdev2: developer Message-ID: Tony will restock yellow cabinet From amol at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: May 2, 2000 Subject: Problem svgdev2: Loader cassette does not send wafer to developer station. Message-ID: Loader cassette does not send wafer to developer station. From mahnaz at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 3, 2000 Subject: Problem Clear svgdev2: Mario tested the system is ok Message-ID: From lindaw at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 10, 2000 Subject: Problem svgdev2: wont raise chuck to wafer Message-ID: auto or manual, the chuck does not come up to meet the wafer, but it sounds like the vacuum is kicking on. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 10, 2000 Subject: Problem Clear svgdev2: Message-ID: reseated wafer carriage, cycled wafer. From greene at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: May 10, 2000 Subject: Shutdown svgdev2: developer track is stuck Message-ID: Wafers will not load From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 11, 2000 Subject: Shutdown Clear svgdev2: Message-ID: adj splash guard height & speed. ready for use From zhang at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: May 16, 2000 Subject: Problem svgdev2: Message-ID: SVGDEV2: At the postbake oven section of the track, wafers tend to tip and fall off. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 16, 2000 Subject: Problem Clear svgdev2: Message-ID: npf. From sanli at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: May 22, 2000 Subject: Problem svgdev2: Broke my wafer Message-ID: This is the second time svgdev2 is breaking my real wafer. The chuck is behaving too harsh to the wafers. Can't something be done about it? This last one I lost was very valuable. svgdev is maybe slightly better, but it has the same problem. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear svgdev2: Message-ID: svgdev2 is working ok. possible chuck vac is stressing your wafer causing it to brake. try using a gel pak. From franklin at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Jun 19, 2000 Subject: Problem svgdev2: won't develop, sensor broke Message-ID: I can't get it to detect my wafer on the develop spindle. It slides over there and the tracks stop spinning put it won't move my wafer down and develop it. I suspect it is related to the metal shield needing to move up for developing. I heard it making a strange noise on the wafer before as it finished with it, as if it was stuck or hitting something as it moved out of the way.. Recommend you use svgdev till this problem is fixed. nate From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 20, 2000 Subject: Problem Clear svgdev2: Message-ID: adj splash shield position, cycled wafers. From phimmer at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Jun 20, 2000 Subject: Problem svgdev2: vacuum on chuck not working Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 21, 2000 Subject: Problem Clear svgdev2: Message-ID: weekly pm performed system working ok ready for use From sverdrup at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: sverdrup at snf.stanford.edu (sverdrup at snf.stanford.edu) Date: Jul 2, 2000 Subject: Problem svgdev2: svgdev2 problem Message-ID: To whom it may concern, After developing the resist and rinsing the wafer, the wafer rises out of the developing tub, but it doesn't move on to the hot plate. The vacuum remains on. Turning the power on and off did not fix the problem. Thanks, Per From beckwith at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 3, 2000 Subject: Problem svgdev2: Message-ID: Found with the power off. 1st tried to run dev 1/bake2 (which someone had changed) wafer sat on the chuck; removed the wafer and loaded dev 3/bake2; wafer sat on the chuck. Maybe someone else can get this to run??? From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 5, 2000 Subject: Problem Clear svgdev2: Message-ID: weekly PM performed ,system back on working ok , ready to use From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 5, 2000 Subject: Problem Clear svgdev2: Message-ID: weekly Performed system back on working ok ready to use From true at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Jul 7, 2000 Subject: Problem svgdev2: sensors not working properly Message-ID: my wafers keeping getting stuck on developer stage. also, initial wafer loading sensor malfunctioning. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 10, 2000 Subject: Problem Clear svgdev2: Message-ID: cycled 24 wafers with no problems. From greene at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem svgdev2: chuck does not come all the way up; wafer sits there, needs manual finger assist...solenide problem? Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem Clear svgdev2: Message-ID: Weekly PM perfomed system working ok ready to use From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 17, 2000 Subject: Shutdown svgdev2: Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 18, 2000 Subject: Shutdown Clear svgdev2: Message-ID: replaced spindle ass'y air cylinder. ready for use. From flannery at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem svgdev2: Sensor Message-ID: Sensor on Feedstack would not sense wafer when cassette descended. From martinez at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear svgdev2: Message-ID: filled dev canister. ready for use From kcbalram at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-07 15:06:57: The hot plate is leaving spots on the back of the wafer Message-ID: <28981850.59.1344377218224.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-07 15:06:57: The hot plate is leaving spots on the back of the wafer Message-ID: <6029715.64.1344437089293.JavaMail.coral@shine> CLeaned Up Hotplate, And Belts, Cycled wafers, Back Of wafers are Clean, Good to use. From bclee79 at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: bclee79 at snf.stanford.edu (bclee79 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-08-21 04:10:59: Backside contaminated Message-ID: <19194605.72.1345547459621.JavaMail.coral@shine> I don't use the backside of my sample wafer but after development, I saw some residue left on my backside and I could not remove it with acetone or IPA. From taotang at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: taotang at snf.stanford.edu (taotang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-08-21 04:39:08: photoresist on back side of dummy wafer Message-ID: <172130.73.1345549149599.JavaMail.coral@shine> It seems some photoresist on the wafer holder of develop stage. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-08-21 04:10:59: Backside contaminated Message-ID: <16583592.155.1345841421074.JavaMail.coral@shine> Someone ran a wafer Upside down and contaminated the hotplate and the belts, Cleaned everything Up and cleaned up Dummy wafers, Ok to use. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-08-21 04:39:08: photoresist on back side of dummy wafer Message-ID: <25635791.156.1345841465234.JavaMail.coral@shine> Someone ran a wafer Upside down and contaminated the hotplate and the belts, Cleaned everything Up and cleaned up Dummy wafers, Ok to use. PLEASE DONT USE THE PHTORESIST DUMMY WAFERS ON THE DEVELOPER TRACKS. From wmtang at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-30 20:37:50: svgdev2 does not work properly Message-ID: <23029153.142.1346384271193.JavaMail.coral@shine> The machine did not response when the start button was pressed. From gsosa at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-30 20:37:50: svgdev2 does not work properly Message-ID: <13236543.4.1346428006107.JavaMail.coral@shine> Tested track operation. All OK. Possibly track not enabled or in manual mode. From jimkruger at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-31 13:10:20: Al splash guard sometimes fails to lift up Message-ID: <17219963.25.1346443820570.JavaMail.coral@shine> The Al splash guard sometimes fails to lift up. This stops the system. Most likely to occur when the system has not been used for a while. Very little force is required to lift it to position, then it seems to continue and work OK for that cassette worth. Low air pressure? Just sticky piston? From gsosa at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-08-31 13:10:20: Al splash guard sometimes fails to lift up Message-ID: <19641879.31.1346449133902.JavaMail.coral@shine> Checked and adjusted speed controllers for splash guard up/down movement. Cycled wafers through track. All looks good. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-09-19 09:37:27: Found the hotplate Dirty Message-ID: <11313504.35.1348072648104.JavaMail.coral@shine> This wasnt reported But During the daily checks Earlier today I found the hotplate full of Some sort of Chemnical ( other than developer or Resist) Cleaned it up and Tested, Ok to use . From zguo at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-19 23:58:37: Hotplate is not lower down the wafer Message-ID: <24631205.73.1348124318078.JavaMail.coral@shine> Bake program 1 is not baking wafer. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-19 23:58:37: Hotplate is not lower down the wafer Message-ID: <12386058.75.1348152675510.JavaMail.coral@shine> Someone changed all the bake programs to " NO BAKE" I changed it back To the Right Settings, Checked all the Programs Eventws and Steps, Everything back to normal, Ok to use. From zzp at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-22 19:14:41: develop program sometimes delayed start Message-ID: <26960286.2.1348366481643.JavaMail.coral@shine> kind of like freezing there with the wafer on the chuck. From gsosa at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-22 19:14:41: develop program sometimes delayed start Message-ID: <18492559.26.1348525106134.JavaMail.coral@shine> Replaced the solinoid for moving the shroud up and down. Adjusted pneumatic speed valves for smooth operation. track tested OK. From bchui at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-27 19:07:42: Frequently freezes when wafer gets accepted by develop chuck Message-ID: <28567496.81.1348798062524.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-09-27 19:07:42: Frequently freezes when wafer gets accepted by develop chuck Message-ID: <1279062.13.1349125239637.JavaMail.coral@shine> Cleaned and Lubricated Air Cylinder, Tested a few times during the morning and afternoon, Cycled all the dummy wafers, System Back to normal , Ok to use. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-11-01 08:02:20: Found the Hotplate Full Of Dirty Stains Again... Message-ID: <21330401.141.1351782140939.JavaMail.coral@shine> I FOund the Hotplate & chuck Full of dirty stains, Not Sure what it was But it was a big mess, Cleaned up and tested. From bchui at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Shutdown svgdev2 SNF 2012-11-13 01:14:02: spin chuck sensor not sensing wafer Message-ID: <32814608.5.1352798043419.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Shutdown svgdev2 SNF 2012-11-13 01:14:02: spin chuck sensor not sensing wafer Message-ID: <31639999.2.1352825280856.JavaMail.coral@shine> The Hotplate Settings were Changed or turned off for some reason, therefore the wafer got stuck on the chuck waiting for the hotplate to heat up.Checked all The hotplate Connections and settings calibrated and tested ( 10 Dummy wafers) all operations ok Ready to use. From calarrudo at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Shutdown svgdev2 SNF 2012-11-24 10:34:18: not completing develop Message-ID: <6129295.20.1353782059378.JavaMail.coral@shine> 4 wafers ruined From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Shutdown svgdev2 SNF 2012-11-24 10:34:18: not completing develop Message-ID: <20529707.9.1353948057471.JavaMail.coral@shine> I've run Several dummy wafers and system working Fine, I run My ASML Quals Wafers and the result was good . , All of my wafers Came out Good , Checked all the rest of the recipes and they are all Good, I calibrated the spindle and its Working as a champ.. Ok to use. From calarrudo at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-11-26 13:33:59: Message-ID: <23115402.39.1353965640170.JavaMail.coral@shine> please fix step 3 in recipe 8. i have tried and am unable to fix the program. From vilanova at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Problem svgdev2 SNF 2012-11-26 13:33:59: Message-ID: <32725674.41.1353966974872.JavaMail.coral@shine> Please if you change the programs , change them back to the right settings , system has been tested ok to use. From gsosa at snf.stanford.edu Fri Jan 11 13:12:57 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:57 -0000 Subject: Comment svgdev2 SNF 2012-12-05 07:40:30: Badger Install 12/4 Message-ID: <17209840.66.1354722031260.JavaMail.coral@shine> Installed and tested Badger interlock box.