Problem svgdev2:

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


On Program 6, it frequently stops (and gets stuck) 
after developing (the wafer chuck vacuum still holds
the wafer and the track is still spread apart.)  Power 
cycling reset it, but it still happens about 80% of the time.




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