Problem svgdev2: Broke my wafer

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


This is the second time svgdev2 is breaking my real wafer. The chuck is behaving too harsh to the wafers. Can't
something be done about it? This last one I lost was very valuable. svgdev is maybe slightly better, but it has the same problem.




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