Problem svgdev2: svgdev2 problem

sverdrup at snf.stanford.edu sverdrup at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


To whom it may concern,
After developing the resist and rinsing the wafer, the wafer rises out of the developing tub, but it doesn't move on to the hot plate.  The vacuum remains on.  Turning the power on and off did not fix the problem.
Thanks,
Per




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