Shutdown svgdev2:
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013
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Problem svgdev2: chuck does not come all the way up; wafer sits there, needs manual finger assist...solenide problem?
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Problem svgdev2: chuck does not come all the way up; wafer sits there, needs manual finger assist...solenide problem?
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Problem svgdev2: Sensor
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