Comment svgdev2 SNF 2012-08-21 04:10:59: Backside contaminated

bclee79 at snf.stanford.edu bclee79 at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


I don't use the backside of my sample wafer but after development, I saw some residue left on my backside and I could not remove it with acetone or IPA. 



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