Problem svgdev2 SNF 2012-09-27 19:07:42: Frequently freezes when wafer gets accepted by develop chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


Cleaned and Lubricated Air Cylinder, Tested  a few times
during the morning and afternoon, Cycled all the dummy wafers, 
System Back to normal , Ok to use. 



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