Shutdown svgdev2 SNF 2012-11-13 01:14:02: spin chuck sensor not sensing wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


The Hotplate  Settings were Changed  or turned off for some reason,
 therefore the wafer got stuck on the chuck waiting for the hotplate to
 heat up.Checked all  The hotplate Connections and settings 
calibrated and tested ( 10 Dummy wafers) all operations ok Ready to 
use. 



More information about the svgdev2-pcs mailing list