Shutdown svgdev2 SNF 2012-11-24 10:34:18: not completing develop

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:12:57 PST 2013


I've run Several dummy wafers and system working Fine, I run My ASML Quals Wafers and the result was good . , All of my wafers Came out
 Good , Checked all the rest of the recipes and they are all Good,
I calibrated the spindle and its Working as a champ.. Ok to use. 



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