DI water off 0700-0715

Dick Crane rcrane at snf.stanford.edu
Thu May 13 15:30:52 PDT 2004

Litho area users,

The DI water loop supplying the svgdev tracks, the wbmiscres and the
mask washer will be off for a few minutes (1-10min) starting at 0700 on
Friday, May 14, to allow the new humidifiers to be connected to the DI
water loop.

Sorry for any inconvenience,


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