From mahnaz at stanford.edu  Wed Jul 16 11:20:34 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 16 Jul 2008 11:20:34 -0700
Subject: Discontinuation of LDD26W
Message-ID: <487E3BF2.1040305@stanford.edu>

Hello all,

The Environmental  Protection Agency ( EPA) began regulating the use 
of    *Perfluoroalkyl sulfonates *  and more specific to us,  
perfluorooctyl sulfonates. What does all this mean?   Roham & Hass ( 
Shipley) will not make or deliver any Ldd26W ( our developer)  that we 
use with 3612 resist which contain this chemical by *January of 2009.* 
This means that December will be the last of the shipment of the developer.

I like to switch even earlier if would be possible.

I have started running experiment with other developers and that will 
take some time for me. I am running the process side by side and then do 
SEM and then repeat it one more time to prove that all is under control.

*I have created a recipe   #8    on SVGDEV2 for me  please leave it 
alone so I do not have to program it every time.
*
I am trying to do this as efficiently and quickly  as  possible and 
share the information with you so  you have enough time to   confirm the 
change  for yourself . I am sure that the change will most likely be   
transparent to your process.
The dead line I have given my self would be till September and if all 
goes well then you will have enough time to confirm that for your self 
if you choose to.
If you have concerns/suggestions or have some extra time  that you can 
put toward community service, let Mary or I know and we will put that 
toward a good use.

My apology for sending out duplicate emails.

mahnaz


From mahnaz at stanford.edu  Wed Jul 16 17:11:32 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 16 Jul 2008 17:11:32 -0700
Subject: Standard program
Message-ID: <487E8E34.1080100@stanford.edu>

Hello all,

I have received few complains from labmembers that some one changes the 
time in standard program 3,1 from 30 seconds to 25 seconds on both 
tracks.. If you are the one who is doing it, STOP.
First of all you are not suppose to make any changes to standard programs.
Secondly,  there should be two programs on the SVGDEV available so copy 
the  program 3,1  and change the time. If there are other reasons,  see 
Mario, Gary or I and we will help.

mahnaz



From mahnaz at stanford.edu  Thu Jul 24 17:43:25 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 24 Jul 2008 17:43:25 -0700
Subject: usage
Message-ID: <488921AD.5080209@stanford.edu>


Hello all,

It has come to my attention along with  few complains that during busy 
times one person enables both tracks. I like to say that,  this is not a 
fair practice  or allowed.  We all like to get our work done in a timely 
fashion So please be consider of your peers and other labmembers  and 
ONLY USE BOTH TRACKS WHEN NO ONE ELSE NEEDS IT.
This is true for SVGcoaters as well.
If there are issues or  concerns please do let me  know.
mahnaz