From gth at snf.stanford.edu Sun Aug 12 00:57:47 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 12 Aug 2007 00:57:47 -0700 Subject: Problem tel SNF 2007-08-12 00:57:47: system stuck. Message-ID: the DRP for the LL does not start up. I aborted a recepie and tried to recover the wafer from PM to LL. but it is stuck in the TC. I called Yasuhiro and he mentioned that the error has to be removed from the LCD panel in the basement - seems some TTemperature problem. did not have access to the basement, so could not fix it. please look at the problem From tberg at snf.stanford.edu Mon Aug 13 08:23:35 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Aug 2007 08:23:35 -0700 Subject: Problem tel SNF 2007-08-12 00:57:47: system stuck. Message-ID: reset and started pump From tberg at snf.stanford.edu Wed Aug 29 08:15:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Aug 2007 08:15:48 -0700 Subject: Comment tel SNF 2007-08-29 08:15:48: Weekly checks completed Message-ID: