Problem tel SNF 2007-08-12 00:57:47: system stuck.

gth at snf.stanford.edu gth at snf.stanford.edu
Sun Aug 12 00:57:47 PDT 2007


the DRP for the LL does not start up.
I aborted a recepie and tried to recover the wafer from PM to LL.
but it is stuck in the TC.
I called Yasuhiro and he mentioned that the error has to be removed from the LCD panel in the basement - seems some TTemperature problem.
did not have access to the basement, so could not fix it.
please look at the problem




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