From masato at snf.stanford.edu Sat Apr 19 12:03:53 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Sat, 19 Apr 2008 12:03:53 -0700 Subject: Problem tel SNF 2008-04-19 12:03:52: Microwave unit error and more Message-ID: Microwave unit error happened, when recipe 50 was running. And I cannnot take wafer 1 out from PM1. I have not shut down equipment, considering that someone may fix them. From tberg at snf.stanford.edu Mon Apr 21 06:23:06 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Apr 2008 06:23:06 -0700 Subject: Comment tel SNF 2008-01-22 11:55:50: Looking for Leak Message-ID: noted From tberg at snf.stanford.edu Mon Apr 21 06:23:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Apr 2008 06:23:23 -0700 Subject: Comment tel SNF 2008-01-23 12:05:40: leak is fixed Message-ID: notd From tberg at snf.stanford.edu Mon Apr 21 06:23:47 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Apr 2008 06:23:47 -0700 Subject: Comment tel SNF 2008-04-21 06:23:47: Reset Microwave unit in basement Message-ID: From tberg at snf.stanford.edu Mon Apr 21 12:32:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Apr 2008 12:32:50 -0700 Subject: Problem tel SNF 2008-04-19 12:03:52: Microwave unit error and more Message-ID: Reset error, Guraf and Yashiro removed wafer From tberg at snf.stanford.edu Mon Apr 21 12:32:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Apr 2008 12:32:58 -0700 Subject: Comment tel SNF 2008-04-21 06:23:47: Reset Microwave unit in basement Message-ID: Reset error, Guraf and Yashiro removed wafer