Problem tel SNF 2008-04-19 12:03:52: Microwave unit error and more

masato at masato at
Sat Apr 19 12:03:53 PDT 2008

Microwave unit error happened, when recipe 50 was running. And I cannnot take wafer 1 out from PM1. I have not shut down equipment, considering that someone may fix them. 

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