From tberg at snf.stanford.edu Wed Aug 13 14:17:39 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Aug 2008 14:17:39 -0700 Subject: Shutdown tel SNF 2008-08-13 14:17:38: Communication Error Message-ID: Yoshiro is trying to reset system From maurice at snf.stanford.edu Wed Aug 13 15:11:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Aug 2008 15:11:58 -0700 Subject: Shutdown tel SNF 2008-08-13 14:17:38: Communication Error Message-ID: issue resolve by Gth and Yasuhiro From gth at snf.stanford.edu Mon Aug 18 21:27:15 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 18 Aug 2008 21:27:15 -0700 Subject: Shutdown tel SNF 2008-08-18 21:27:14: system is off Message-ID: please power up the system ther load lock is purged the computer is off entire system is off From tberg at snf.stanford.edu Tue Aug 19 07:40:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Aug 2008 07:40:18 -0700 Subject: Shutdown tel SNF 2008-08-18 21:27:14: system is off Message-ID: System is powered up in auto >pin position unknown From gth at snf.stanford.edu Tue Aug 19 09:15:58 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 19 Aug 2008 09:15:58 -0700 Subject: Problem tel SNF 2008-08-19 09:15:57: pin pos unknown Message-ID: the Process chamber shows a red icon saying "pin pos unknown". I tried to go to manual mode and set it to down, but it says "NG" please help From tberg at snf.stanford.edu Tue Aug 19 10:15:47 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Aug 2008 10:15:47 -0700 Subject: Problem tel SNF 2008-08-19 09:15:57: pin pos unknown Message-ID: Gurav reset pin positions From tberg at snf.stanford.edu Tue Aug 19 10:16:09 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Aug 2008 10:16:09 -0700 Subject: Comment tel SNF 2008-08-19 10:16:09: Reset stage herater assy Message-ID: From tberg at snf.stanford.edu Wed Aug 20 06:14:16 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Aug 2008 06:14:16 -0700 Subject: Comment tel SNF 2008-08-19 10:16:09: Reset stage herater assy Message-ID: noted From tberg at snf.stanford.edu Wed Aug 20 06:14:32 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Aug 2008 06:14:32 -0700 Subject: Comment tel SNF 2008-05-27 08:19:01: Restarted all pumps and Turbo Message-ID: noted From gth at snf.stanford.edu Mon Aug 25 12:56:14 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 25 Aug 2008 12:56:14 -0700 Subject: Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber Message-ID: no luck even after homing the robot. does not identify the LL1 positions. the arm does not move the MW is on and the Temp is at 500C Ted, please have a look thanks From maurice at snf.stanford.edu Mon Aug 25 15:40:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Aug 2008 15:40:47 -0700 Subject: Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber Message-ID: GTH reports: deleted wafer position and then created wafer position. works fine now. fixed it with the help of Masaharu thanks -gaurav From gth at snf.stanford.edu Mon Aug 25 15:51:00 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 25 Aug 2008 15:51:00 -0700 Subject: Comment tel SNF 2008-08-25 15:51:00: put LL2 wafer and new LL3 wafer Message-ID: the LL3 wafer was scarred. hence replaced it with a new one also put LL2 wafer for better sensing of position in LL (Yasuhiro's recommendation) now the LL has 3 wafers in all - LL1 - 12 inch wafer LL2 - 12 inch wafer LL3 - 12 inch - 4 inch cut out (mickey mouse) From gth at snf.stanford.edu Thu Aug 28 16:32:34 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 28 Aug 2008 16:32:34 -0700 Subject: Problem tel SNF 2008-08-28 16:32:34: error when purging LL Message-ID: previously this problem was intermittent, now it is consistent. when we try to purge the LL, it gives an error. we clear the error, then purge it again, it works but the LL lid vibrates rather scaringly. Do we need a permanment fix for this as currently we are surviving on this workaround ? From gth at snf.stanford.edu Thu Aug 28 17:04:25 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 28 Aug 2008 17:04:25 -0700 Subject: Problem tel SNF 2008-08-28 17:04:24: improper load out of wafers Message-ID: This is again a problem which was intermittent before but now it is consistent The wafer unloading into the LL (after the process finishes), is not proper. There is a gap/clearance of ~ 1 cm. This is a problem as it fails to recognize the wafers when it has to reload or when conditioning (LL1) and process (LL3) are used together as part of a macro The workaround has been to put another wafer in LL2 position