Problem tel SNF 2008-08-19 09:15:57: pin pos unknown
gth at snf.stanford.edu
gth at snf.stanford.edu
Tue Aug 19 09:15:58 PDT 2008
the Process chamber shows a red icon saying "pin pos unknown".
I tried to go to manual mode and set it to down, but it says "NG"
please help
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