Comment tel SNF 2008-05-27 08:19:01: Restarted all pumps and Turbo
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Aug 20 06:14:32 PDT 2008
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Comment tel SNF 2008-08-19 10:16:09: Reset stage herater assy
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Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber
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noted
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Comment tel SNF 2008-08-19 10:16:09: Reset stage herater assy
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Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber
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