Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber

gth at snf.stanford.edu gth at snf.stanford.edu
Mon Aug 25 12:56:14 PDT 2008


no luck even after homing the robot.
does not identify the LL1 positions. the arm does not move
the MW is on and the Temp is at 500C
Ted, please have a look
thanks




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