Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber

gth at snf.stanford.edu gth at snf.stanford.edu
Mon Aug 25 12:56:14 PDT 2008

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no luck even after homing the robot.
does not identify the LL1 positions. the arm does not move
the MW is on and the Temp is at 500C
Ted, please have a look
thanks

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