Shutdown tel SNF 2008-08-25 12:56:14: wafer stuck in Transfer chamber

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Aug 25 15:40:47 PDT 2008


GTH reports:
deleted wafer position and then created wafer position.
works fine now.
fixed it with the help of Masaharu
thanks
-gaurav




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