From tberg at snf.stanford.edu Mon Sep 8 12:33:59 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Sep 2008 12:33:59 -0700 Subject: Comment tel SNF 2008-09-08 12:33:58: Restarted pumps and microwave Message-ID: Found 2 mech pumps off. restarted pumps and MW unit as well as chiller From tura at snf.stanford.edu Tue Sep 9 11:12:43 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 9 Sep 2008 11:12:43 -0700 Subject: Problem tel SNF 2008-09-09 11:12:43: DRP1 down Message-ID: From tberg at snf.stanford.edu Tue Sep 9 12:24:46 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 12:24:46 -0700 Subject: Problem tel SNF 2008-09-09 11:12:43: DRP1 down Message-ID: Cooling fan had moved away from pump. Reset and restarted From masaharu at snf.stanford.edu Thu Sep 11 10:45:13 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 11 Sep 2008 10:45:13 -0700 Subject: Problem tel SNF 2008-09-11 10:45:12: microwave unit error Message-ID: I saw two errors: 086 microwave unit error MW PLS Duty over error From tberg at snf.stanford.edu Thu Sep 11 14:32:41 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Sep 2008 14:32:41 -0700 Subject: Comment tel SNF 2008-09-08 12:33:58: Restarted pumps and microwave Message-ID: Noted From tberg at snf.stanford.edu Thu Sep 11 14:33:32 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Sep 2008 14:33:32 -0700 Subject: Problem tel SNF 2008-09-11 10:45:12: microwave unit error Message-ID: REstarted microwave unit, dry pumps and tubo after cooling water failure From tberg at snf.stanford.edu Mon Sep 29 12:49:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Sep 2008 12:49:23 -0700 Subject: Problem tel SNF 2008-08-28 17:04:24: improper load out of wafers Message-ID: Normal operation From tberg at snf.stanford.edu Mon Sep 29 13:07:20 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Sep 2008 13:07:20 -0700 Subject: Comment tel SNF 2008-09-29 13:07:19: Restarted pump 1 Message-ID: