Problem tel SNF 2008-08-28 17:04:24: improper load out of wafers
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Sep 29 12:49:23 PDT 2008
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Problem tel SNF 2008-09-11 10:45:12: microwave unit error
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Comment tel SNF 2008-09-29 13:07:19: Restarted pump 1
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Problem tel SNF 2008-09-11 10:45:12: microwave unit error
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Comment tel SNF 2008-09-29 13:07:19: Restarted pump 1
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