From gth at snf.stanford.edu Tue Aug 4 13:57:00 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 4 Aug 2009 13:57:00 -0700 Subject: Shutdown tel SNF 2009-08-04 13:56:59: wafer stuck in process chamber. Message-ID: started the macro by mistake, w/o turning on the MW heater. I forgot how to recover the wafer ! From tberg at snf.stanford.edu Wed Aug 5 08:22:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 5 Aug 2009 08:22:12 -0700 Subject: Shutdown tel SNF 2009-08-04 13:56:59: wafer stuck in process chamber. Message-ID: Removed wafer from process module-reset microwave error From tberg at snf.stanford.edu Fri Aug 28 13:33:06 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 28 Aug 2009 13:33:06 -0700 Subject: Comment tel SNF 2009-08-28 13:33:06: TEL recovered after power glitch Message-ID: