Comment tel SNF 2009-08-28 13:33:06: TEL recovered after power glitch
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri Aug 28 13:33:06 PDT 2009
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Shutdown tel SNF 2009-08-04 13:56:59: wafer stuck in process chamber.
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Previous message:
Shutdown tel SNF 2009-08-04 13:56:59: wafer stuck in process chamber.
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