Problem tel SNF 2009-07-06 15:36:43: Robots moving too fast?

narii at snf.stanford.edu narii at snf.stanford.edu
Mon Jul 6 15:36:44 PDT 2009


Wafers moving out from mickey mouse shaped place while LL to chamber sequence. Uniformity seems worsened because of it. Before it was within 2% range but now it is bit less than 4%.




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