TEL checkout

Ted Berg tberg at stanford.edu
Mon Jun 29 13:33:47 PDT 2009


Hello All,
    TEL FS and myself have checked reported issues and corrected same. 
Vent atm switch was adjusted and wafers transfered from LL to process 
numerous times from all 3 slots no issues observed. Please send email 
with any other issues, Thanks,ted



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