From gth at snf.stanford.edu Mon Mar 2 17:16:00 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 2 Mar 2009 17:16:00 -0800 Subject: Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error Message-ID: From gth at snf.stanford.edu Mon Mar 2 17:40:44 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 2 Mar 2009 17:40:44 -0800 Subject: Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks Message-ID: From gth at snf.stanford.edu Mon Mar 2 17:41:06 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 2 Mar 2009 17:41:06 -0800 Subject: Shutdown tel SNF 2009-03-02 17:41:05: chiller errors + black burn marks Message-ID: From tberg at snf.stanford.edu Tue Mar 3 07:20:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Mar 2009 07:20:03 -0800 Subject: Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error Message-ID: Added coolant to chiller cleared errors From tberg at snf.stanford.edu Tue Mar 3 07:20:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Mar 2009 07:20:30 -0800 Subject: Shutdown tel SNF 2009-03-02 17:41:05: chiller errors + black burn marks Message-ID: Added coolant to chiller cleared errors From gth at snf.stanford.edu Sat Mar 14 17:03:40 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 14 Mar 2009 17:03:40 -0700 Subject: Problem tel SNF 2009-03-14 17:03:40: chiller and coolant low flow errors again Message-ID: hi Ted This error has reoccured again in the last one week. Is it some major issue ? or is the coolant leaking ? thanks ~gaurav From tberg at snf.stanford.edu Mon Mar 16 06:43:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:43:12 -0700 Subject: Problem tel SNF 2009-03-14 17:03:40: chiller and coolant low flow errors again Message-ID: Added coolant to chiller From tberg at snf.stanford.edu Mon Mar 16 06:43:54 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:43:54 -0700 Subject: Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks Message-ID: Decided to wait on cleaning From gth at snf.stanford.edu Sat Mar 21 18:48:13 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 21 Mar 2009 18:48:13 -0700 Subject: Problem tel SNF 2009-03-21 18:48:13: chamber coolant low flow error Message-ID: hi ted there was this error. i cleared it but i think it is a warning for a future problem. I am curious, why the coolant is running out ? thanks ~gaurav From tberg at snf.stanford.edu Mon Mar 23 14:11:09 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:11:09 -0700 Subject: Comment tel SNF 2009-03-23 14:11:08: Checked chiller in basement no leaks Message-ID: Checked chiller in basement no leaks. Will look upstairs tomorrow From tberg at snf.stanford.edu Tue Mar 24 14:16:38 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Mar 2009 14:16:38 -0700 Subject: Comment tel SNF 2009-03-24 14:16:37: Found a small leak Message-ID: Found a small leak on flowswitch for Galden replaced and monitoring From tberg at snf.stanford.edu Fri Mar 27 13:55:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 13:55:13 -0700 Subject: Problem tel SNF 2009-03-21 18:48:13: chamber coolant low flow error Message-ID: Replaced leaking flow switch and monitored all week level still good From tberg at snf.stanford.edu Fri Mar 27 13:55:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 13:55:24 -0700 Subject: Comment tel SNF 2009-03-23 14:11:08: Checked chiller in basement no leaks Message-ID: Replaced leaking flow switch and monitored all week level still good From tberg at snf.stanford.edu Fri Mar 27 13:55:35 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 13:55:35 -0700 Subject: Comment tel SNF 2009-03-24 14:16:37: Found a small leak Message-ID: Replaced leaking flow switch and monitored all week level still good