Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks
gth at snf.stanford.edu
gth at snf.stanford.edu
Mon Mar 2 17:40:44 PST 2009
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Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error
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Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks
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Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error
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Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks
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