March 2009 Archives by thread

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Starting: Mon Mar 2 17:16:00 PST 2009
Ending: Fri Mar 27 13:55:35 PDT 2009
Messages: 14

• Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error   gth at snf.stanford.edu
  • Problem tel SNF 2009-03-02 17:15:59: Chiller error and chamber coolant low flow error   tberg at snf.stanford.edu
• Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks   gth at snf.stanford.edu
  • Problem tel SNF 2009-03-02 17:40:43: process wafer in LL3 has black burn marks   tberg at snf.stanford.edu
• Shutdown tel SNF 2009-03-02 17:41:05: chiller errors + black burn marks   gth at snf.stanford.edu
  • Shutdown tel SNF 2009-03-02 17:41:05: chiller errors + black burn marks   tberg at snf.stanford.edu
• Problem tel SNF 2009-03-14 17:03:40: chiller and coolant low flow errors again   gth at snf.stanford.edu
  • Problem tel SNF 2009-03-14 17:03:40: chiller and coolant low flow errors again   tberg at snf.stanford.edu
• Problem tel SNF 2009-03-21 18:48:13: chamber coolant low flow error   gth at snf.stanford.edu
  • Problem tel SNF 2009-03-21 18:48:13: chamber coolant low flow error   tberg at snf.stanford.edu
• Comment tel SNF 2009-03-23 14:11:08: Checked chiller in basement no leaks   tberg at snf.stanford.edu
  • Comment tel SNF 2009-03-23 14:11:08: Checked chiller in basement no leaks   tberg at snf.stanford.edu
• Comment tel SNF 2009-03-24 14:16:37: Found a small leak   tberg at snf.stanford.edu
  • Comment tel SNF 2009-03-24 14:16:37: Found a small leak   tberg at snf.stanford.edu

Last message date: Fri Mar 27 13:55:35 PDT 2009
Archived on: Sun Dec 23 09:24:33 PST 2012

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