From narii at snf.stanford.edu Sun May 10 15:22:01 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 10 May 2009 15:22:01 -0700 Subject: Problem tel SNF 2009-05-10 15:22:00: 086 Microwave unit error Message-ID: Got this error while running seasoning recipe. Gaurav is on his way to help fixing it. From tberg at snf.stanford.edu Mon May 11 09:04:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 May 2009 09:04:16 -0700 Subject: Problem tel SNF 2009-05-10 15:22:00: 086 Microwave unit error Message-ID: rESET MICROWAVE ERROR From gth at snf.stanford.edu Mon May 11 22:45:47 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 11 May 2009 22:45:47 -0700 Subject: Problem tel SNF 2009-05-11 22:45:45: Stage H unknown. Message-ID: Dear Ted. The stage heater is "unknown". This is wierd. After you fixed the MW error, the wafer was in the process chamber (PM). I just moved the wafer from PM back to LL. The Stage Heater was always unknown, even though the temperature is 200C. please have a look. thanks ~gaurav From tberg at snf.stanford.edu Tue May 12 06:32:57 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 12 May 2009 06:32:57 -0700 Subject: Problem tel SNF 2009-05-11 22:45:45: Stage H unknown. Message-ID: Reset computer and cycled heater on and off now it knows where it is From narii at snf.stanford.edu Tue May 19 14:37:33 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 19 May 2009 14:37:33 -0700 Subject: Problem tel SNF 2009-05-19 14:37:33: MW cooling unit error plus some more errors. Message-ID: Have cooling water error, MW unit error and some errors I don't know what it is. Cooling unit seems fine from PM maintainance screen though. From tberg at snf.stanford.edu Wed May 20 07:19:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 May 2009 07:19:16 -0700 Subject: Problem tel SNF 2009-05-19 14:37:33: MW cooling unit error plus some more errors. Message-ID: reset cooling water interlocks and reset MW unit all errors cleared now From yuhykr at snf.stanford.edu Wed May 20 20:20:17 2009 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Wed, 20 May 2009 20:20:17 -0700 Subject: Shutdown tel SNF 2009-05-20 20:20:17: Several errors showing up when logged in Message-ID: We found several errors in the screen when logged in MW generator cooling water low flow MW PLS duty error Microwave unit error From tberg at snf.stanford.edu Thu May 21 07:07:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 May 2009 07:07:14 -0700 Subject: Shutdown tel SNF 2009-05-20 20:20:17: Several errors showing up when logged in Message-ID: Reset cooling water flow alarms. restarted tmp cleared all alarms