Problem tel SNF 2009-05-11 22:45:45: Stage H unknown.

gth at snf.stanford.edu gth at snf.stanford.edu
Mon May 11 22:45:47 PDT 2009


Dear Ted.
The stage heater is "unknown". This is wierd. After you fixed the MW error, the wafer was in the process chamber (PM). 
I just moved the wafer from PM back to LL.
The Stage Heater was always unknown, even though the temperature is 200C.
please have a look.
thanks
~gaurav




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