From tberg at snf.stanford.edu Thu Oct 8 09:52:15 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Oct 2009 09:52:15 -0700 Subject: Comment tel SNF 2009-10-08 09:52:14: Re assembled Message-ID: Heater is reassembled and tested waiting for heater cover and final re assembly From tberg at snf.stanford.edu Fri Oct 16 13:51:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 16 Oct 2009 13:51:24 -0700 Subject: Comment tel SNF 2009-10-16 13:51:24: Update on Status Message-ID: Parts should arrive early next week along with FS. Heater has been replaced and is doing nicely. Hopefully up by Thursday of next week From tberg at snf.stanford.edu Wed Oct 21 14:42:20 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:42:20 -0700 Subject: Shutdown tel SNF 2009-09-08 13:03:03: While heating chamber, target temperature reset Message-ID: Heater, all quartz replaced tested. Should run conditioning and then OK to run From tberg at snf.stanford.edu Wed Oct 21 14:42:46 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:42:46 -0700 Subject: Comment tel SNF 2009-08-28 13:33:06: TEL recovered after power glitch Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:42:55 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:42:55 -0700 Subject: Comment tel SNF 2009-09-09 08:59:32: Consulting with FS Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:43:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:43:03 -0700 Subject: Comment tel SNF 2009-09-14 11:55:05: Heater destroyed Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:43:11 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:43:11 -0700 Subject: Comment tel SNF 2009-09-15 10:41:04: FS working on Parts Ordering Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:43:35 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:43:35 -0700 Subject: Comment tel SNF 2009-09-30 07:55:03: Parts are located Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:43:45 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:43:45 -0700 Subject: Comment tel SNF 2009-10-08 09:52:14: Re assembled Message-ID: Repaired and back on line From tberg at snf.stanford.edu Wed Oct 21 14:43:54 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Oct 2009 14:43:54 -0700 Subject: Comment tel SNF 2009-10-16 13:51:24: Update on Status Message-ID: Repaired and back on line From narii at snf.stanford.edu Wed Oct 21 21:13:39 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 21 Oct 2009 21:13:39 -0700 Subject: Comment tel SNF 2009-10-21 21:13:37: Is this intended? Message-ID: Stage heater was set to 400C rather than 200C, and microwave heater was left on. I do not know if this is intened or not, so after I'm using it, I'll set to 400C and will not turn off the microwave heater. From narii at snf.stanford.edu Thu Oct 22 00:14:52 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 22 Oct 2009 00:14:52 -0700 Subject: Comment tel SNF 2009-10-22 00:14:52: Heater set as Peter told Message-ID: Heater set to 200C, shut off microwave. From gth at snf.stanford.edu Thu Oct 22 01:06:10 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 22 Oct 2009 01:06:10 -0700 Subject: Problem tel SNF 2009-10-22 01:06:10: please clarify, Message-ID: Dear Ted. Please clarify the status of the heater and the precautions the users should take while turning it on and off. From tberg at snf.stanford.edu Thu Oct 22 07:35:44 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Oct 2009 07:35:44 -0700 Subject: Problem tel SNF 2009-10-22 01:06:10: please clarify, Message-ID: OK here is the recommendation from TEL. Cycling the heater is bad even small changes so it should be set at the temperature where it is used most. It looks to me like most recipes are at 500 so that is where they recommend leaving it with possible transitions to other recipe temps as needed. The microwave heater same scenario leave it on all the time it doesn't need to be cycled on and off. If we should experience another power failure the bring up procedure should be, bring it to 100 C check for proper operation, then ramp slowly in 25 degree increments until it reaches idle temp which i am assuming is 500 C. From tberg at snf.stanford.edu Thu Oct 22 07:35:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Oct 2009 07:35:53 -0700 Subject: Comment tel SNF 2009-10-21 21:13:37: Is this intended? Message-ID: OK here is the recommendation from TEL. Cycling the heater is bad even small changes so it should be set at the temperature where it is used most. It looks to me like most recipes are at 500 so that is where they recommend leaving it with possible transitions to other recipe temps as needed. The microwave heater same scenario leave it on all the time it doesn't need to be cycled on and off. If we should experience another power failure the bring up procedure should be, bring it to 100 C check for proper operation, then ramp slowly in 25 degree increments until it reaches idle temp which i am assuming is 500 C. From tberg at snf.stanford.edu Thu Oct 22 07:35:59 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Oct 2009 07:35:59 -0700 Subject: Comment tel SNF 2009-10-22 00:14:52: Heater set as Peter told Message-ID: OK here is the recommendation from TEL. Cycling the heater is bad even small changes so it should be set at the temperature where it is used most. It looks to me like most recipes are at 500 so that is where they recommend leaving it with possible transitions to other recipe temps as needed. The microwave heater same scenario leave it on all the time it doesn't need to be cycled on and off. If we should experience another power failure the bring up procedure should be, bring it to 100 C check for proper operation, then ramp slowly in 25 degree increments until it reaches idle temp which i am assuming is 500 C. From tberg at snf.stanford.edu Fri Oct 23 06:19:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 06:19:43 -0700 Subject: Comment tel SNF 2009-10-23 06:19:43: Set stage heater to 500 Message-ID: Set stage heater to 500 and turned on MW heater From gth at snf.stanford.edu Thu Oct 29 00:19:02 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 29 Oct 2009 00:19:02 -0700 Subject: Shutdown tel SNF 2009-10-29 00:19:02: liquid leak near Load Lock - coolant, oil or water ? Message-ID: From tberg at snf.stanford.edu Thu Oct 29 09:55:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 09:55:14 -0700 Subject: Shutdown tel SNF 2009-10-29 00:19:02: liquid leak near Load Lock - coolant, oil or water ? Message-ID: replaced flow swtch that was leaking cleaned up leak. brought stage back to 500 From slcheng at snf.stanford.edu Fri Oct 30 21:59:32 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 30 Oct 2009 21:59:32 -0700 Subject: Problem tel SNF 2009-10-30 21:59:31: wafer stuckinside the chamber Message-ID: not able to clear the alarm From gth at snf.stanford.edu Sat Oct 31 03:35:33 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 31 Oct 2009 03:35:33 -0700 Subject: Shutdown tel SNF 2009-10-31 03:35:33: wafer stuck. Message-ID: Previous user turned off MW and ran wafer. now his wafer stuck. tried to recover wafer and ramped down the temp to 200C. no luck. shutting down the system.