Problem tel SNF 2009-10-30 21:59:31: wafer stuckinside the chamber

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Fri Oct 30 21:59:32 PDT 2009

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not able to clear the alarm

Previous message: Shutdown tel SNF 2009-10-29 00:19:02: liquid leak near Load Lock - coolant, oil or water ?
Next message: Shutdown tel SNF 2009-10-31 03:35:33: wafer stuck.
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