Shutdown tel SNF 2009-10-31 03:35:33: wafer stuck.

gth at snf.stanford.edu gth at snf.stanford.edu
Sat Oct 31 03:35:33 PDT 2009

Previous message: Problem tel SNF 2009-10-30 21:59:31: wafer stuckinside the chamber
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Previous user turned off MW and ran wafer. now his wafer stuck. tried to recover wafer and ramped down the temp to 200C.
no luck.
shutting down the system.

Previous message: Problem tel SNF 2009-10-30 21:59:31: wafer stuckinside the chamber
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