From narii at snf.stanford.edu  Sun Feb 28 00:51:56 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Sun, 28 Feb 2010 00:51:56 -0800
Subject: Problem tel SNF 2010-02-28 00:51:55: 086 microwave unit error
Message-ID: <mailman.182.1356283470.4750.tel-pcs@snf.stanford.edu>

While seasoning the chamber with recipe 1 ( 5torr, 300sec), microwave unit error occured.



From gth at snf.stanford.edu  Sun Feb 28 10:34:35 2010
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Sun, 28 Feb 2010 10:34:35 -0800
Subject: Shutdown tel SNF 2010-02-28 10:34:34: MW error + wafer stuck in chamber
Message-ID: <mailman.183.1356283470.4750.tel-pcs@snf.stanford.edu>