From maurice at snf.stanford.edu Mon Mar 1 08:01:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 Mar 2010 08:01:02 -0800 Subject: Shutdown tel SNF 2010-02-28 10:34:34: MW error + wafer stuck in chamber Message-ID: Ray reset MW power supply From maurice at snf.stanford.edu Mon Mar 1 08:01:32 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 Mar 2010 08:01:32 -0800 Subject: Problem tel SNF 2010-02-28 00:51:55: 086 microwave unit error Message-ID: Ray reset MW power supply From gth at snf.stanford.edu Mon Mar 1 18:26:07 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 1 Mar 2010 18:26:07 -0800 Subject: Shutdown tel SNF 2010-03-01 18:26:06: MW failed again Message-ID: This is the same problem which we saw a few months back. MW failing after 200sec into the recipe/ The reflected power is normal (less than 15 W). Peter / Ted, I would appreciate if you can attend to this problem. From seymour at snf.stanford.edu Tue Mar 2 07:59:04 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 07:59:04 -0800 Subject: Comment tel SNF 2010-03-02 07:59:03: TEL MW power Message-ID: I chatted to Ted this morning and he suggested turning the power setting down on the MW supply. It may require a little longer process time but will not overheat the supply. From seymour at snf.stanford.edu Tue Mar 2 08:11:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:11:23 -0800 Subject: Shutdown tel SNF 2010-03-01 18:26:06: MW failed again Message-ID: I reset the MW power supply thermal interlock. From seymour at snf.stanford.edu Tue Mar 2 11:35:14 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 11:35:14 -0800 Subject: Shutdown tel SNF 2010-03-02 11:35:13: looking into cooling on MW supply. Message-ID: From seymour at snf.stanford.edu Tue Mar 2 11:45:43 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 11:45:43 -0800 Subject: Shutdown tel SNF 2010-03-02 11:35:13: looking into cooling on MW supply. Message-ID: I will need to get some more information on how to open the power supply. From alsune at snf.stanford.edu Tue Mar 2 18:33:27 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 2 Mar 2010 18:33:27 -0800 Subject: Shutdown tel SNF 2010-03-02 18:33:27: 086 microwave unit error Message-ID: Gaurave and I reduced the microwave power from 3.4kW to 3kW. The plasma was flickering. The reflected power rised from 8W to about 30W. Reflected power was oscillating pretty fast between 28W and 11W every second or so. Before finishing, the process failed with an error message 086 microwave unit error. From rostam at snf.stanford.edu Tue Mar 2 18:35:21 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 2 Mar 2010 18:35:21 -0800 Subject: Comment tel SNF 2010-03-02 18:35:20: I shut down the machine. By mistake I used aslune's coral to shut it down Message-ID: I shut down the machine. By mistake I used aslune's coral to shut it down From gth at snf.stanford.edu Tue Mar 2 18:40:20 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 2 Mar 2010 18:40:20 -0800 Subject: Shutdown tel SNF 2010-03-02 18:40:19: adding to Rostam report. Message-ID: 3.4 kW MW power , the process failed at 212 sec / 500sec 3 kW MW power , the process failed at 355 sec / 500sec Ted/Peter - Please give feedback to TEL Japan. If we are seeing this problem, TEL-Japan should have seen this on their systems long back. Are we sure it is not some ambient cooling issue, or oil issue or heater issue ? Reducing power does not sound the best solution esp. since other parameters like Flow Rate, Pressure etc has to simultaneously change if Flickering of plasma is to be avoided. From seymour at snf.stanford.edu Wed Mar 3 11:29:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Mar 2010 11:29:06 -0800 Subject: Shutdown tel SNF 2010-03-02 18:40:19: adding to Rostam report. Message-ID: I reset the thermo interlock on the MW power supply. I vacuumed off the front grille and the input side of the filter. Needs a test to determine if cleaning filter area helps the cooling. From seymour at snf.stanford.edu Wed Mar 3 11:32:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Mar 2010 11:32:06 -0800 Subject: Problem tel SNF 2010-03-03 11:32:06: cleaned air input with shop vacuum Message-ID: Needs a test to determine if cleaning increases cooling to the MW power supply. Please run at normal power level for the test. From seymour at snf.stanford.edu Wed Mar 3 11:33:20 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Mar 2010 11:33:20 -0800 Subject: Shutdown tel SNF 2010-03-02 18:33:27: 086 microwave unit error Message-ID: I cleaned the input filter on the MW power supply. Test is required to evaluate cooling problem. From rostam at snf.stanford.edu Wed Mar 3 23:11:22 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 3 Mar 2010 23:11:22 -0800 Subject: Shutdown tel SNF 2010-03-03 23:11:21: 086 microwave unit error Message-ID: 3.4 kW MW power , the process failed at 202 sec / 500sec From tberg at snf.stanford.edu Mon Mar 8 08:48:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 08:48:12 -0800 Subject: Comment tel SNF 2010-03-08 08:48:11: Checked coolant flow to MW unit Message-ID: Checked coolant flow to MW unit, it was low adjusted needs checkout From tberg at snf.stanford.edu Mon Mar 8 08:48:50 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 08:48:50 -0800 Subject: Shutdown tel SNF 2010-03-03 23:11:21: 086 microwave unit error Message-ID: Adjusted water flow to MW unit. needs checkout. From tberg at snf.stanford.edu Mon Mar 8 12:30:19 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 12:30:19 -0800 Subject: Comment tel SNF 2010-03-08 12:30:18: Keep it yellow for a while Message-ID: It ran fine for 495sec at 3.4kW. Thanks for fixing it. Best, Rostam Keep it yellow for a while longer From tberg at snf.stanford.edu Fri Mar 12 06:34:24 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Mar 2010 06:34:24 -0800 Subject: Problem tel SNF 2010-03-03 11:32:06: cleaned air input with shop vacuum Message-ID: No problems for a week From tberg at snf.stanford.edu Fri Mar 12 06:34:35 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Mar 2010 06:34:35 -0800 Subject: Comment tel SNF 2010-03-08 08:48:11: Checked coolant flow to MW unit Message-ID: No problems for a week From tberg at snf.stanford.edu Fri Mar 12 06:34:42 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Mar 2010 06:34:42 -0800 Subject: Comment tel SNF 2010-03-08 12:30:18: Keep it yellow for a while Message-ID: No problems for a week From tberg at snf.stanford.edu Fri Mar 12 06:34:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Mar 2010 06:34:52 -0800 Subject: Comment tel SNF 2010-03-02 18:35:20: I shut down the machine. By mistake I used aslune's coral to shut it down Message-ID: No problems for a week From tberg at snf.stanford.edu Fri Mar 12 06:35:07 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Mar 2010 06:35:07 -0800 Subject: Comment tel SNF 2010-03-02 07:59:03: TEL MW power Message-ID: No problems for a week