Shutdown tel SNF 2010-03-02 18:33:27: 086 microwave unit error

alsune at snf.stanford.edu alsune at snf.stanford.edu
Tue Mar 2 18:33:27 PST 2010


Gaurave and I reduced the microwave power from 3.4kW to 3kW. The plasma was flickering. The reflected power rised from 8W to about 30W. Reflected power was oscillating pretty fast between 28W and 11W every second or so. Before finishing, the process failed with an error message
086 microwave unit error.




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