From tberg at snf.stanford.edu Mon Jan 3 06:11:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Jan 2011 06:11:33 -0800 Subject: Shutdown tel SNF 2010-12-17 09:16:39: Power off Message-ID: back up From alsune at snf.stanford.edu Mon Jan 24 22:38:19 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 24 Jan 2011 22:38:19 -0800 Subject: Shutdown tel SNF 2011-01-24 22:38:18: Wafer is stuck in process chamber Message-ID: As checking the initial state, found the wafer in the process chamber. Attempted to place the wafer into LL1, but couldn't get it to work. Also, attempted to run the seasoning run, but got an error message that said it was impossible. Since the machine hasn't been run in a while, somebody must have used it was forgot to report the problem. From tberg at snf.stanford.edu Tue Jan 25 07:26:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Jan 2011 07:26:49 -0800 Subject: Shutdown tel SNF 2011-01-24 22:38:18: Wafer is stuck in process chamber Message-ID: Moved wafer back to LL ran conditioning program no problem