Shutdown tel SNF 2011-01-24 22:38:18: Wafer is stuck in process chamber

alsune at snf.stanford.edu alsune at snf.stanford.edu
Mon Jan 24 22:38:19 PST 2011


As checking the initial state, found the wafer in the process chamber. Attempted to place the wafer into LL1, but couldn't get it to work. Also, attempted to run the seasoning run, but got an error message that said it was impossible. Since the machine hasn't been run in a while, somebody must have used it was forgot to report the problem.




More information about the tel-pcs mailing list