From tberg at snf.stanford.edu Wed Nov 2 07:13:37 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 07:13:37 -0700 Subject: Comment tel SNF 2011-11-02 07:13:37: Raised temp to 500 Message-ID: From itot at snf.stanford.edu Thu Nov 10 22:33:42 2011 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Thu, 10 Nov 2011 22:33:42 -0800 Subject: Problem tel SNF 2011-11-10 22:33:41: wafer does't come back Message-ID: "152 V-Arm routine time" Alarm From tberg at snf.stanford.edu Fri Nov 11 07:29:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Nov 2011 07:29:39 -0800 Subject: Problem tel SNF 2011-11-10 22:33:41: wafer does't come back Message-ID: Vented transfer and ll chambers removed wafer From hazeghi at snf.stanford.edu Tue Nov 22 13:26:01 2011 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Tue, 22 Nov 2011 13:26:01 -0800 Subject: Problem tel SNF 2011-11-22 13:26:01: MW UNIT ALARAM Message-ID: After logging in at 1:15PM, I noticed the following alarms. All alarms generated around 10AM on Nov 22. The MW unit alarms cannot be cleared so I did not operate the tool. ALARMS: 086 MW UNIT ERROR 108 MW PLS DUTY OVER ERROR 034 WAVEGUIDE COOLING ERROR 032 TMP COOLING WATER LOW FLOW From tberg at snf.stanford.edu Tue Nov 29 08:46:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Nov 2011 08:46:30 -0800 Subject: Problem tel SNF 2011-11-22 13:26:01: MW UNIT ALARAM Message-ID: Reset MW unit.. restarted all Mech pumps and turbo. No alarms at this time. Units failed because of cooling water problem. From hazeghi at snf.stanford.edu Tue Nov 29 14:02:18 2011 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Tue, 29 Nov 2011 14:02:18 -0800 Subject: Comment tel SNF 2011-11-29 14:02:17: Lowered "set" temperature Message-ID: Lowered "set" temperature to 400C.